Semiconductor Manufacturing

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Semiconductor Manufacturing
10106021030600Semiconductor Manufacturing
<emphasis role="bold">Overview</emphasis> This chapter shows how layout is used to create integrated circuits. The chapter describes the manufacture of wafers and the processing steps of depositing, patterning, and etching different layers of material to create an integrated circuit. An example CMOS process flow is described showing chip cross sections and equivalent layout at each step.
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Grant McFarland: Microprocessor Design: A Practical Guide from Design Planning to Manufacturing. Semiconductor Manufacturing, Chapter (McGraw-Hill Professional, 2006), AccessEngineering Export