Preface


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Preface
PrefaceLithography, the patterning technology for the fabrication of integrated circuits (ICs), is the most critical technology in modern information technology (IT). Since invention of the IC in 1958, the number of transistors in ICs has been increasing dramatically, along with progress in resolution in lithography. Lithographic resolution increased with the decrease achieved in exposure wavelength, which finally pushed the semiconductor industry to pursue the extreme ultraviolet (EUV) wavelength for lithographic exposure.This book is intended to be an overview of EUV lithography (EUVL) technology. In the last 10 years, EUVL may have been the most popular technological topic in th…
Citation
Banqiu Wu; Ajay Kumar: Extreme Ultraviolet Lithography. Preface, Chapter (McGraw-Hill Professional, 2009), AccessEngineering Export