About the Authors


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About the Authors
About the AuthorsBanqiu Wu, Ph.D., is a distinguished member of the technical staff and chief technical officer of Mask Etch and Clean Division, Applied Materials, Inc.. Previously, Dr. Wu was a senior staff scientist with Photronics, Inc., and an associate professor at Harbin Institute of Technology in China. Dr. Wu has 20 years of experience in plasma, etch, mask, and lithography, as well as advanced materials processing. He has published over 50 articles in 10 peer-reviewed journals and several conference proceedings, holds multiple patents, and has authored and coauthored several books, including Photomask Fabrication Technology, published by McGraw-Hill in 2005.
Citation
Banqiu Wu; Ajay Kumar: Extreme Ultraviolet Lithography. About the Authors, Chapter (McGraw-Hill Professional, 2009), AccessEngineering Export