EUV Metrology

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EUV Metrology
Richard M. Silver and Andras E. Vladar 10106061010608EUV Metrology
<emphasis role="bold">Introduction</emphasis> This chapter covers a number of the essential techniques needed for semiconductor process control, extreme ultraviolet (EUV) photomask metrology, and reference metrology for use in EUV semiconductor manufacturing. The chapter will cover a broad range of metrology…
Banqiu Wu; Ajay Kumar: Extreme Ultraviolet Lithography. EUV Metrology, Chapter (McGraw-Hill Professional, 2009), AccessEngineering Export