HIGH-RESOLUTION LITHOGRAPHY FOR OPTOELECTRONICS


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HIGH-RESOLUTION LITHOGRAPHY FOR OPTOELECTRONICS
Martin Peckerar, P.-T. Ho, and Y. J. Chen 1010606HIGH-RESOLUTION LITHOGRAPHY FOR OPTOELECTRONICS
<emphasis role="italic"><emphasis role="bold">INTRODUCTION</emphasis></emphasis> For many years, miniature light sources such as light-emitting diodes (LEDs) and solid-state lasers have been combined with diode sensors through a variety of optical channels and modulators on a single integr…
Citation
Ronald W Waynant; Marwood N. Ediger: Electro-Optics Handbook, Second Edition. HIGH-RESOLUTION LITHOGRAPHY FOR OPTOELECTRONICS, Chapter (McGraw-Hill Professional, 2000), AccessEngineering Export