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10106081030300 Interconnects
Introduction The role of interconnects in integrated circuit performances has considerably increased with the technology scale down. Figure 5.1 shows the evolution of the aspect of the integrated circuit. In 0.12 μm, 6 to 8 metal layers are available.
Evolution of interconnect between 0.7 μm technology and 0.12 μm technology (Inv3.MSK)
Etienne Sicard; Sonia Delmas Bendhia: Basics of CMOS Cell Design. Interconnects, Chapter (McGraw-Hill Professional, 2007), AccessEngineering Export