Radiofrequency MEMS Switches

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Radiofrequency MEMS Switches
10106011010608Radiofrequency MEMS Switches
<emphasis role="bold">Introduction</emphasis> Radiofrequency (RF) microelectromechanical systems (MEMS) switches are devices that use mechanical movement to achieve a short circuit or an open circuit in an RF transmission line. Usually, an RF MEMS switch is integrated into a planar transmission line [e.g., as a microstrip, coplanar waveguide (CPW), slotline, etc.]. The RF MEMS switch consists of, at least, a metal bridge, a transmission line, a…
John H. Lau; Chengkuo Lee; C. S. Premachandran; Yu Aibin: Advanced MEMS Packaging. Radiofrequency MEMS Switches, Chapter (McGraw-Hill Professional, 2010), AccessEngineering Export