Biosensor Packaging

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Biosensor Packaging
101010010106011010608Biosensor Packaging
<emphasis role="bold">Introduction</emphasis> Microelectromechanical systems (MEMS) devices are used as biosensors in many applications. Pressure sensors, accelerometers, microphones, micromirrors, and other types of MEMS devices are used for biosensor applications. Biosensors are categorized into different types based on the application: in vivo, implantable, and wearable types. Accelerometers are used in pace…
John H. Lau; Chengkuo Lee; C. S. Premachandran; Yu Aibin: Advanced MEMS Packaging. Biosensor Packaging, Chapter (McGraw-Hill Professional, 2010), AccessEngineering Export