Bio-MEMS Packaging

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Bio-MEMS Packaging
101010010106011010608Bio-MEMS Packaging
<emphasis role="bold">Introduction</emphasis> Miniaturization is the recent trend in analytical chemistry and life sciences. In the past two decades, miniaturization of fluid handling and fluid analysis has been emerging in the research field of microfluidics. Microfluidics can be interpreted as the manipulation of liquids and gases in channels having cross-sectional dimensions on the order of 10 to 100 μm. Micro…
John H. Lau; Chengkuo Lee; C. S. Premachandran; Yu Aibin: Advanced MEMS Packaging. Bio-MEMS Packaging, Chapter (McGraw-Hill Professional, 2010), AccessEngineering Export