Optical MEMS: Microbolometer Packaging

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Optical MEMS: Microbolometer Packaging
101060110106061010608Optical MEMS: Microbolometer Packaging
<emphasis role="bold">Introduction</emphasis> Vacuum is crucial to certain microelectromechanical systems (MEMS) devices; it helps in improving their performance and at the same time protects them from the environment. Thermal isolation inside the package also can be created by employing vacuum inside the package. An infrared (IR) bolometer works on the principle of change …
John H. Lau; Chengkuo Lee; C. S. Premachandran; Yu Aibin: Advanced MEMS Packaging. Optical MEMS: Microbolometer Packaging, Chapter (McGraw-Hill Professional, 2010), AccessEngineering Export