Introduction to MEMS

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Introduction to MEMS
10106011010608Introduction to MEMS
<emphasis role="bold">Introduction</emphasis> MEMS stand for microelectromechanical systems, which are the integration of mechanical elements such as sensors and actuators and electronics on a common silicon substrate through the use of microfabrication technology.
John H. Lau; Chengkuo Lee; C. S. Premachandran; Yu Aibin: Advanced MEMS Packaging. Introduction to MEMS, Chapter (McGraw-Hill Professional, 2010), AccessEngineering Export